Sugawara, M. (Professor, Professor, Hachinohe Institute of Technology, Japan)
Plasma Etching: Fundamentals and Applications - Series on Semiconductor Science and Technology Sugawara, M. (Professor, Professor, Hachinohe Institute of Technology, Japan)

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Plasma Etching: Fundamentals and Applications - Series on Semiconductor Science and Technology

Sugawara, M. (Professor, Professor, Hachinohe Institute of Technology, Japan)

The focus of this book is the remarkable advances in understanding of low pressure RF (radio frequency) glow discharges. A basic analytical theory and plasma physics are explained. Plasma diagnostics are also covered before the practicalities of etcher use are explored.

356 pages, 2 colour plates, 5 halftones, numerous line figures

Media	Kirjat Hardcover Book (Sidottu kirja kovilla kansilla sekä suojakannella)
Julkaisupäivämäärä	torstai 28. toukokuuta 1998
ISBN13	9780198562870
Tuottaja	Oxford University Press
Sivujen määrä	356
Mitta	163 × 242 × 23 mm · 743 g
Kieli	Englanti

Katso kaikki joka sisältää Sugawara, M. (Professor, Professor, Hachinohe Institute of Technology, Japan) ( Esim. Hardcover Book )

Sugawara, M. (Professor, Professor, Hachinohe Institute of Technology, Japan) Plasma Etching: Fundamentals and Applications - Series on Semiconductor Science and Technology Sugawara, M. (Professor, Professor, Hachinohe Institute of Technology, Japan)

Plasma Etching: Fundamentals and Applications - Series on Semiconductor Science and Technology

Sugawara, M. (Professor, Professor, Hachinohe Institute of Technology, Japan)

Sugawara, M. (Professor, Professor, Hachinohe Institute of Technology, Japan)
Plasma Etching: Fundamentals and Applications - Series on Semiconductor Science and Technology Sugawara, M. (Professor, Professor, Hachinohe Institute of Technology, Japan)