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Physical Design and Mask Synthesis for Directed Self-Assembly Lithography - NanoScience and Technology Softcover Reprint of the Original 1st 2018 edition
Seongbo Shim
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Physical Design and Mask Synthesis for Directed Self-Assembly Lithography - NanoScience and Technology Softcover Reprint of the Original 1st 2018 edition
Seongbo Shim
This book discusses physical design and mask synthesis of directed self-assembly lithography (DSAL). It covers the basic background of DSAL technology, physical design optimizations such as placement and redundant via insertion, and DSAL mask synthesis as well as its verification.
138 pages, 40 Tables, color; 54 Illustrations, color; 38 Illustrations, black and white; XIV, 138 p.
Media | Kirjat Paperback Book (Kirja pehmeillä kansilla ja liimatulla selällä) |
Julkaisupäivämäärä | perjantai 8. helmikuuta 2019 |
ISBN13 | 9783030094553 |
Tuottaja | Springer Nature Switzerland AG |
Sivujen määrä | 138 |
Mitta | 226 g |
Kieli | German |
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